I would switch to:
https://github.com/dezem/AtmoXL-Titel-Installer
Awoo still has the nsz bug where it can result in corrupted installs. If you don't have any titles installed you can use Goldleaf to install from the SD Card, that's usually what I do. Then use this title to run AtmoXL and...
Your NSP is probably bad. The size for BoTW is 14,476,256,042 bytes. If yours is less it probably didn't download fully. I had the same thing happen using CDNSP.
Excellent guide, thank you. Took about 60-90 minutes, everything was very clearly written and easy to follow. Now on 5.1.0 with 4 burnt fuses (from 3.0.2).
You can try microcorruption, and there are some decent explanations of the solutions on people's blogs:
https://microcorruption.com/login
http://writing.hcarver.com/fun%20with%20assembly/2015/01/10/fun-with-assembly-1/