Of corse i used the files for the new 3DS. I didn't know 3DS guide before i googled the error, If I had it I would have used it^^
I also use the N3DS File for CTRTransfer and followed the 3DS Guide.
My firmware was 11.3.0.35E, SafeMode don't work, i just can enter Hourglass, GodMode and Luma Config